SG-A Series

SG-

SG series improves the consistency of customers' products with its ultra fast, ultra power saving, high reliability and compact size. You can choose a performance that matches exactly, or customize a special configuration for you 

【Application】
  • Semiconductor
    Applied：
       Etch： Centura MXP, DPS，eMax；
       PVD ： PVD-Strip OX Etch;
       CVD ： Centura P-CVD；Centura MXP、DXZ、HDP；P-5000；Victor HDP
    Lam：
       CVD ： （Novellus）Speed HDP; Concept；Vector HDP
    Sumitomo E-TON Implant： Implant-OX-Strip，ION Accelerator
  • Solar panel / LCD


    【Specifications】
    ●1000~8000W
    ●High speed，32bit CPU Maximum 8 unit inside
    ●LCD touchpanel
    ●Use our matching box can achieve the shortest time matching
    ●Corresponding to the communication protocol of each host manufacturer
    ●The physical dimensions of each original factory are completely matched


    • 【Product】
    Half rack size
    PARA-MOUNT Alternative products
    Half rack PARA-MOUNT Alternative products
    RFG-Alternative products
    Air cooled
    SG-III
    SG-A-TH
    SG-A-PAR
    SG-AH-PAR
    SG-A-RFG
    SG-IV
    SG-III