Safety countermeasures of Speed CVD's RF generator
♦19 inch rack width, which can be directly replaced
♦The height is lower than the original, which is conducive to heat dissipation
♦Low voltage high efficiency grouping parallel RF amplifier
♦Low voltage high efficiency grouping AC/DC inverter
♦The RF power start-up time is digitally controllable,
and the power efficiency in the low-power section is not reduced
♦Frequency digital adjustable
♦Optional high-speed, long-life, double vacuum bellows automatic matching box selectable
- ♦Flame retardant design, will not cause fire
♦Teflon wires are used for DC, AC and RF line
♦RF amplifiers are connected in parallel, and the rated output power of each group is limited to less than 1.5kW
♦The AC / DC inverter is composed of multiple groups, and the rated output power of each group is limited to less than 3KW (the cost is 4 times that of the inverter of m company) (there is only one 10kW of m company)
♦Each group of inverters has a built-in fuse, and each group has its own CPU to detect voltage and current
♦There are up to 10 CPU and 3 FPGA in the GENERIC RF generator
♦Each group of AC / DC converters and RF amplifiers has a 2 times margin
♦With overcurrent breaker to form multiple protection。