GENERIC for DPS--Air cooled and safety structural designd RF generator
♦AMAT Centura DPS / DPN-CVD，Centura HDP CVD / P-CVD，
♦Lam Concept1-2 / Speed / Vector，
♦The smallest ~ 12KW air-cooled RF generator in the world，
♦The only one in the world 32bit CPU 2～10unit + FPGA 2~4unit in one generator,
♦Output power 1kW / 2kW / 3kW / 5kW / 5.5kW / 8kW / 9kW /~12kW
♦Generic has 12KW air-cooled RF generator with the largest output power, the highest efficiency
and the smallest size in the semiconductor industry(usually the air-cooled is only 350-1000w).
The size of RF amplifier is only 1/6 ~ 1/10 of competitive products, no cooling water required
(usually 200 ~ 600 liter / hour required).
♦GENERIC has the RF generator with the highest energy efficiency in the semiconductor industry (only 40% ~ 80% of the competitive products).
♦The latest RISC 32bit CPU are 2~8unit inside, low output voltage, grouping control to realize safe and
high speed RF control.
The full color touch screen to complete a high degree of self diagnosis and save event records.
♦Flame retardant design will not cause fire. Teflon wires are used for DC, AC and RF line.
The amplifier has built-in fuse, which forms multiple protection with overcurrent protection switch.
♦SG-IV series pays attention to environmental design, and the recyclability of parts is as high as 90%,
reducing industrial waste to the greatest extent.
