Safety countermeasures of HDP CVD's RF generator

HDP CVD

♦19 inch rack width, which can be directly replaced; It can also be replaced by a whole set of racks
♦The height is lower than the original, which is conducive to heat dissipation
♦Low voltage high efficiency grouping parallel RF amplifier
♦Low voltage high efficiency grouping AC/DC inverter
♦The RF power start-up time is digitally controllable,
  and the power efficiency in the low-power section is not reduced
♦Frequency digital adjustable
♦Optional high-speed, long-life, double vacuum bellows automatic matching box selectable

【Safety RF generator】
  • ♦Flame retardant design, will not cause fire
    ♦Teflon wires are used for DC, AC and RF line
    ♦RF amplifiers are connected in parallel, and the rated output power of each group is limited to less   than 1.5kW
    ♦The AC / DC inverter is composed of multiple groups, and the rated output power of each group is   limited to less than 3KW (the cost is 4 times that of the inverter of m company) (there is only one   10kW of m company) 
    ♦Each group of inverters has a built-in fuse, and each group has its own CPU to detect voltage and   current
    ♦There are up to 10 CPU and 3 FPGA in the GENERIC RF generator 
    ♦Each group of AC / DC converters and RF amplifiers has a 2 times margin
    ♦With overcurrent breaker to form multiple protection。 



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